Design and process development of silicon nanowire based DNA biosensor using electron beam lithography

2008 International Conference on Electronic Design, ICED 2008

Volumn , Issue , 2008, Pages

  Hashim, Uda ^a   Rahman, Siti Fatimah Abd ^a   Nor, M Nuzaihan Md ^a   Salleh, Shahrir ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

Author keywords

Biosensor; DNA hybridization; Electron beam lithography; Nanowire

Indexed keywords

BIOMOLECULE DETECTIONS; BIOSENSOR; BIOSENSOR APPLICATIONS; DNA BIOSENSORS; DNA HYBRIDIZATION; DNA HYBRIDIZATION DETECTIONS; ELECTRICAL TRANSPORT MEASUREMENTS; ELECTRONIC CHARGES; ELECTRONIC SIGNALS; LINE WIDTHS; NANOWIRE; PROCESS DEVELOPMENT; SILICON NANOWIRES; UNIQUE FEATURES;

BIOMOLECULES; DNA; ELECTRIC WIRE; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONIC PROPERTIES; ELECTRONS; FABRICATION; FIELD EFFECT TRANSISTORS; GENES; NANOWIRES; NUCLEIC ACIDS; OHMIC CONTACTS; SIGNAL TRANSDUCTION;

BIOSENSORS;

EID: 63649110027     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICED.2008.4786648     Document Type: Conference Paper

References (12)

1. Scott E. McNeil. Nanotechnology for the biologist. Journal of Leukocyte Biology (78), September 2005, pp. 585-587
2. S. Padmanabhan, B. Richey, C. F. Anderson, and M. T. Record, Jr., Biochemistry 27, 4367 (1988), pp 243
3. Dorothee Grieshaber, Robert MacKenzie, Janos Voros and Erik Reimhult, (2008). Electrochemical Biosensors - Sensor Principles and Architectures. Sensors 2008, pp. 121-125
4. Gengfeng Zheng, (2006). Semiconductor Nanowire FET Sensors : Label-free, Ultrasensitive, Multiplexed Biomolecule Detection and Biophysical Studies. pp. 1402-1403
5. Taylor,R.F. and Schultz,J.S. (1996) Handbook of Chemical and Biological Sensors. Institute of Physics Publishing, Bristol, UK.
6. Christopoulos,T.K. (1999) Anal. Chem., 71, 425R-438R.
7. Zhai,J., Hong,C. and Yang,R. (1997) Biotechnol. Adv., 15, 43-58.
8. Palecek,E., Fojta,M., Tomschick,M. and Wang,J. (1998) Biosens. Bioelectron., 13, 621-628.
9. H. Berney, J. West, E. Haefele, J. Alderman, W. Lane and J.K. Collins. A DNA diagnostic biosensor: development, characterization and performance. Sensors and Actuators 68 (2000), pp. 505-508
10. Wusi C. Maki, Nirankar N. Mishra, Eric G. Cameron, Brian Filanoski, Shiva K. Rastogi and Gary K. Maki. Nanowire-transistor based Ultrasensitive DNA Methylation Detection. Biosensors and Bioelectronics 23 (2008), pp. 2329
11. Shinji Matsui (1997). Nanostructure fabrication using Electron Beam and Its application to nanometer Devices. Proceeding of the IEEE, Vol 85, No 4. pp 629-643.
12. M.Nuzaihan Md Nor, S Niza Mohammad Bajuri and Uda Hashim. Pattern Design for Nanowire Formation using Raith Elphy Quantum GDS11 Editor. Annual Fundamental Science Seminar 2005. pp 112-114.