Investigation of various surface passivation layers using oxide/nitride stacks of silicon solar cells

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1069-1072

  Lee, Ji Youn ^a   Dicker, Jochen ^a   Rein, Stefan ^a   Glunz, Stefan W ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING WAFERS; NITRIDE STACKS; PASSIVATION QUALITY;

HEAT CONDUCTION; PASSIVATION; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; THERMAL EFFECTS; THERMOOXIDATION;

SILICON SOLAR CELLS;

EID: 6344294002     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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