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Volumn , Issue , 2000, Pages 154-157

Electrostatic spring effect on the dynamic performance of microresonators

Author keywords

Electrostatic spring effect; Natural frequency; Resonator; Simulation; Uncertainty analysis

Indexed keywords

ELECTROSTATIC FORCE; ELECTROSTATIC SPRING EFFECTS; MICROSWITHES; UNCERTAINTY ANALYSIS;

EID: 6344292399     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (6)
  • 5
    • 0032640070 scopus 로고    scopus 로고
    • Accurate fully-coupled natural frequency shift of MEMS actuators due to voltage bias and other external forces
    • Y.He, J.Marchetti, C.Gallegos & F.Maseeh, "Accurate fully-coupled natural frequency shift of MEMS actuators due to voltage bias and other external forces", Proc. MEMS'99, 321-325, 1999.
    • (1999) Proc. MEMS'99 , pp. 321-325
    • He, Y.1    Marchetti, J.2    Gallegos, C.3    Maseeh, F.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.