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Volumn , Issue , 2000, Pages 154-157
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Electrostatic spring effect on the dynamic performance of microresonators
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Author keywords
Electrostatic spring effect; Natural frequency; Resonator; Simulation; Uncertainty analysis
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Indexed keywords
ELECTROSTATIC FORCE;
ELECTROSTATIC SPRING EFFECTS;
MICROSWITHES;
UNCERTAINTY ANALYSIS;
COMPUTER AIDED DESIGN;
COMPUTER SIMULATION;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
GYROSCOPES;
MICROELECTROMECHANICAL DEVICES;
NATURAL FREQUENCIES;
SILICON ON INSULATOR TECHNOLOGY;
RESONATORS;
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EID: 6344292399
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (6)
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