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2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 605-608

Simulation for low temperature coefficient design of piezoresistive and hall sensors

(2) Matsuda, K a Kanda, Y b

a NARUTO UNIVERSITY OF EDUCATION (Japan)

b TOYO UNIVERSITY (Japan)

Author keywords

Hall; Mobility; Piezoresistance; Sensor; TC

Indexed keywords

CARRIER CONCENTRATION; COMPUTATIONAL METHODS; COMPUTER SIMULATION; DIFFERENTIATION (CALCULUS); FERMI LEVEL; IONIZATION; ITERATIVE METHODS; PIEZOELECTRIC DEVICES;

HALL SENSORS; IMPURITY CONCENTRATIONS; PIEZORESISTANCE; TEMPERATURE COEFFICIENTS (TC);

SENSORS;

EID: 6344289339 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

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