Simulation and fabrication of subwavelength structures for a nanometer feature enabling lens-less laser writers

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Volumn 26, Issue 5 SUPPL., 2004, Pages

  Lin, D Z ^a   Yu, L B ^a   Lee, C K ^a   Yeh, C S ^a   Lin, C L ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Extraordinary transmission; Finite difference time domain; Lithography; Nanostructures; Nanowriter; Surface plasma

Indexed keywords

COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; LASERS; LENSES; LIGHT; NANOSTRUCTURED MATERIALS; PLASMAS; TIME DOMAIN ANALYSIS;

FABRICATION PROCESSES; LASER WRITER SYSTEMS; METAL FILMS; SUBMICROMETERS;

MICROMETERS;

METAL;

CONFERENCE PAPER; DEVICE; DIFFRACTION; ELECTROMAGNETIC FIELD; ENERGY; FILM; FINITE DIFFERENCE TIME DOMAIN METHOD; LASER; LENS; LIGHT; NANOTECHNOLOGY; OPTICS; PHENOMENOLOGY; PRIORITY JOURNAL; SCANNING NEAR FIELD OPTICAL MICROSCOPY; SIMULATION; STRUCTURE ANALYSIS; SURFACE PROPERTY; TECHNIQUE;

LASERS; LENSES; MICROMETERS; PLASMA; SIMULATION;

EID: 6344261445     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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