Nonlocal problems in MEMS device control

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 509-512

  Pelesko, J A ^a   Triolo, A A ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

Electrostatic actuation; Instability; MEMS control; Nonlocal elliptic problem; Pull in

Indexed keywords

BIFURCATION (MATHEMATICS); CAPACITANCE; CAPACITORS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; SYSTEM STABILITY;

CONTROL CIRCUITS; MEMS CONTROL; NONLOCAL ELLIPTIC PROBLEM; PULL-IN VOLTAGE INSTABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 6344258761     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. H.C. Nathanson, W.E. Newell, R.A. Wickstrom and J.R. Davis, "The Resonant Gate Transistor", IEEE Trans. on Electron Devices, 14 (1967), pp. 117-133.
2. P.B. Chu and K.S.J. Pister, "Analysis of Closed-loop Control of Parallel-Plate Electrostatic Micro-grippers", Proc. IEEE Int. Conf. Robotics and Automation, (1994), pp. 820-825.
3. J.I. Seeger and S.B. Crary, "Stabilization of Electrostatically Acutated Mechanical Devices", Proc. of the 1997 Intl. Conf. on Solid-State Sensors and Actuators (1997), pp. 1133-1136.
4. J.J. Seeger and S.B. Crary, "Analysis and Simulation of MOS Capacitor Feedback for Stabilizing Electrostatically Actuated Mechanical Devices", Second Int. Conf. on the Simulation and Design of Microsystems and Microstructures - MICROSIM97, (1997), pp. 199-208.
5. E.K. Chan and R.W. Dutton, "Effects of Capacitors, Resistors and Residual Change on the Static and Dynamic Performance of Electrostatically Actuated Devices", Proc. of SPIE, 3680 (1999), pp. 120-130.
6. J.A. Pelesko and A.A. Triolo, "Nonlocal Problems in MEMS Device Control", Jrnl. of Eng. Math., submitted.
7. D. Bernstein, P. Guidotti and J.A. Pelesko, "Analytical and Numerical Analysis of Electrostatically Actuated MEMS Devices", Sensors and Actuators, submitted.