Microelectrodischarge machining for MEMS applications

IEE Colloquium (Digest)

Volumn , Issue 32, 2000, Pages 27-30

  Allen, D M ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FLUIDS; MICRO-ELECTRODES; VOLTAGE GENERATORS;

ASPECT RATIO; DIELECTRIC MATERIALS; ELECTRIC DISCHARGE MACHINING; ELECTROCHEMISTRY; NOZZLES; QUALITY CONTROL; SURFACE ROUGHNESS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344243719     PISSN: 09633308     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (5)

1. D.M. Allen; "Micro-electrodischarge Machining (μ-EDM)" in Micromachining of Engineering Materials, ed. J.A.McGeough (Marcel Dekker, in the press).
2. th CIRP General Assembly, Montreux, CIRP Annals, Vol. 48 /1 / 127-130, 1999.
3. D.M.Allen and S.X.Huang; AFM quantitative data provides a new understanding of microelectrodischarge machined surfaces, International Journal of Electrical Machining, No. 4, 7-12, 1999.
4. H.J.A.Almond, D.M.Allen and P.M.Logan; Examination of the internal profiles of microelectrodischarge machined holes and the detection of material defects, International Journal of Electrical Machining, No. 5, 2000 (in the press).
5. H.J.A. Almond and D.M. Allen; Influence of materials selection and quality on ink jet nozzles fabricated by microelectrodischarge machining, Proceedings of Design, Test, Integration and Packaging of MEMS / MOEMS Conference, Paris, SPIE, May 2000 (in the press).