Characterization of laser-fired contacts processed on wafers with different resistivity

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1032-1035

  Grohe, A ^a   Schneiderlochner E ^a   Hermle, M ^a   Preu, R ^a   Glunz, S W ^a   Willeke, G ^a   Walz, S ^b  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACK SURFACE FIELD (BSF); CONTACT PATTERN; ELECTRON BEAM INDUCED CURRENCY (EBIC); LASER-FIRED CONTACT (LFC);

LASER BEAM EFFECTS; LITHOGRAPHY; MATHEMATICAL MODELS; NATURAL FREQUENCIES; SCANNING; SILICON; SPECTROSCOPIC ANALYSIS;

SOLAR CELLS;

EID: 6344238967     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. R. Preu, E. Schneiderlöchner, R. Lüdemann, and S. W. Glunz, "Verfahren zur Herstellung eines Halbleiter-Metallkontakts durch eine dielektriche Schicht", Patent No. WO 02/25742, DE 100 46 170 (2000)
2. E. Schneiderlöchner, R. Preu, R. Lüdemann, S. W. Glunz, and G. Willeke, "Laser-Fired Contacts", Proceedings of the 17th European Photovoltaic Solar Energy Conference (Munich, Germany, 2001) p. 1303
3. E. Schneiderlöchner, R. Preu, R. Lüdemann, and S. W. Glunz, "Laser-Fired Rear Contacts for Crystalline Silicon Solar Cells", Progress in Photovoltaics: Research and Applications 10, 1 (2002), p. 29
4. E. Schneiderlöchner, R. Preu, A. Grohe, C. Ballif, S. W. Glunz, and G. Willeke, "Investigations on Laser Fired Contacts for Passivated Rear Solar Cells", Proceedings of the 29th IEEE Photovoltaic Specialists Conference (New Orleans, Louisiana, USA, 2002) p. in print
5. + cell structures" (this conference), Proceedings of the WCPEC-3 (Osaka, Japan, 2003)
6. E. Schneiderlöchner, "scanning Nd:YAG laser system for industrial applicable processing in silicon solar cell manufacturing" (this conference), Proceedings of the WCPEC3 (Osaka, Japan, 2003)
7. U. Müller, Proceedings of the Surface Interface Analysis 27 (1999) p. 904