A nanoscale composite material for enhanced damage tolerance in MEMS applications

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 1, Issue , 2004, Pages 363-366

  Paranjpye, A ^a   MacDonald, Noel C ^a   Beltz, Glenn E ^a  

^a University of California   (United States)

Author keywords

Composite; Damage tolerance; MEMS; Silicon

Indexed keywords

COMPOSITE; DAMAGE TOLERANCE; MEMS; SINGLE CRYSTAL SILICON BEAMS;

BRITTLENESS; CANTILEVER BEAMS; COMPOSITE MATERIALS; CRACK INITIATION; FITS AND TOLERANCES; FRACTURE TOUGHNESS; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; SILICON; SINGLE CRYSTALS; STRESS ANALYSIS; STRUCTURAL DESIGN;

MICROELECTROMECHANICAL DEVICES;

EID: 6344233591     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. M. P. Rao, A. J. Sanchez-Herencia, G. E. Beltz, R. M. McMeeking, and F. F. Lange, Science 286, 102-105 (1999).
2. K. Yasutake, M. Iwata, K. Yoshii, M. Umeno, and H. Kawabe, Journal of Materials Science 21, 2185-2192 (1986).
3. T. N. Pornsin-sirirak, Y. C. Tai, H. Nassef, and C. M. Ho, Sensors and Actuators a-Physical 89, 95-103 (2001).
4. R. M. McMeeking and K. Hbaieb, Zeitschrift Fur Metallkunde 90, 1031-1036 (1999).
5. S. Johansson, F. Ericson, and J. A. Schweitz, Journal of Applied Physics 65, 122-128 (1989).
6. S. Johansson, J. A. Schweitz, L. Tenerz, and J. Tiren, Journal of Applied Physics 63, 4799-4803 (1988).