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Volumn , Issue , 2000, Pages 712-715

CFD-micromesh: A fast geometric modeling and mesh generation tool for 3D microsystem simulations

Author keywords

3D modeling; Mesh generation; TCAD

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DIFFUSION; ETCHING; FINITE ELEMENT METHOD; IMAGE ANALYSIS; MICROELECTROMECHANICAL DEVICES; STANDARDS; THREE DIMENSIONAL;

EID: 6344232093     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (20)

References (4)
  • 2
    • 0012536765 scopus 로고    scopus 로고
    • Efficient algorithms for three-dimensional etching and deposition simulation
    • Pyka W., Martins R., Selberherr S., "Efficient Algorithms for Three-Dimensional Etching and Deposition Simulation," Proc. SISPAD 98 Conf., 16-19, 1998.
    • (1998) Proc. SISPAD 98 Conf. , pp. 16-19
    • Pyka, W.1    Martins, R.2    Selberherr, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.