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Volumn , Issue , 2000, Pages 712-715
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CFD-micromesh: A fast geometric modeling and mesh generation tool for 3D microsystem simulations
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Author keywords
3D modeling; Mesh generation; TCAD
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Indexed keywords
COMPUTATIONAL FLUID DYNAMICS;
COMPUTER AIDED DESIGN;
COMPUTER SIMULATION;
DIFFUSION;
ETCHING;
FINITE ELEMENT METHOD;
IMAGE ANALYSIS;
MICROELECTROMECHANICAL DEVICES;
STANDARDS;
THREE DIMENSIONAL;
MESH GENERATION;
TCAD;
THREE-DIMENSIONAL (3D) MODELING;
VECTOR FORMATS;
MICROELECTRONICS;
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EID: 6344232093
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (20)
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References (4)
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