CAPILLARY FORCES AT THE INTERFACE OF A MEMS ACTUATOR

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 365-370

  Sager, Chad ^a   Saif, Taher ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXTRACTION; IONIZATION; MICROCHANNELS;

CAPILLARY FORCE; CONTACT LINES; DE-IONIZED WATER; DESIGN METHOD; MAXIMUM FORCES; MEMS ACTUATORS; NOVEL DESIGN; SENSITIVE AREA; SHARP EDGES; WATER SURFACE;

DESIGN;

EID: 6344231683     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0292     Document Type: Conference Paper

References (5)

1. Oliver J. R, C. Huh, and S. G. Mason, “Resistance to Spreading of Liquids by Sharp Edges,” Journal of Colloid and Interface Science, Vol. 59, No. 3, pp. 568-581, 1977.
2. Shaw K. A., Zhang Z. L., and MacDonald, N. C., “SCREAM 1: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures,” Sensors andActuators, Vol. A 40, pp. 63-70, 1994.
3. Saif M. T. A. and MacDonald, N. C., “Measurement of forces and spring constants of microinstruments,” Review ofScientific Instruments, Vol. 69, Number 3, pp. 1410-1422, 1998.
4. Hosokawa K., Shimoyama L, and Miura H., “Two-dimensional micro-self-assembly using the surface tension of water,” Sensors andActuators, Vol. A 57, pp. 117-125, 1996.
5. Sager C. R. and Saif M. T. A. “Work in progress,” 1999.