Identification of anisoelasticity and nonproportional damping in MEMS gyroscopes

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 343-346

  Phani, A Srikantha ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Anisoelasticity; MEMS gyroscope; Modal coupling; Nonproportional damping

Indexed keywords

CALIBRATION; DAMPING; FREQUENCY RESPONSE; IDENTIFICATION (CONTROL SYSTEMS); OPTIMIZATION; PARAMETER ESTIMATION; PERTURBATION TECHNIQUES; STIFFNESS MATRIX;

ANISOELASTICITY; MEMS GYROSCOPES; MODAL COUPLING; NONPROPORTIONAL DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344229710     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Fritzen, C.-P., Identification of mass, damping, and stiffness matrices of mechanical systems, Transactions of ASME, Journal of Vibration, Acoustics, Stress, and Reliability in Design, Vol. 108, No. 9, pp. 9-16, 1986.
2. Painter, C. C. and Shkel, A. M., Identification of anisoelasticity for electrostatic "trimming" of rate integrating gyroscope, SPIE Annual International Symposium on Smart Structures and Materials, New Port Beach, CA., Vol. March, 2001.
3. Palaniappan, M., IEEE-MEMS 2003, pp. 482-485, 2003.
4. Bhakar, A., Estimates of errors in the frequency response of non-classically damped systems, Journal of Sound and Vibration, Vol. 184, No. 1, pp. 59-72, 1995.