Simulation of aluminum micro-mirrors for space applications at cryogenic temperatures

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 676-679

  Kuhn, J L ^a   Dutta, S B ^a   Greenhouse, M A ^a   Mott, D B ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

Cryogenic; Electrostatic; Micro mirrors; Simulation; Thermal

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; CRYOGENICS; ELECTROSTATICS; FINITE ELEMENT METHOD; MIRRORS; PROBLEM SOLVING; TORQUE;

MICRO-MIRRORS; THERMAL; TORSION BARS; VERTICAL BEAM DEFLECTION;

SPACE FLIGHT;

EID: 6344226953     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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6. S.B. Dutta, D.B. Mott, C.A. Allen, J.L. Kuhn, J.W. MacKenty, and R.L. Smith, "Development of a 3×3 Array of Individually Addressable Micro-Mirrors for Space Applications," Int. Conf. on Integrated Nano/Microtech. for Space Apps., 2000.