Design and modeling of a 3-D micromachined accelerometer

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 259-262

  Ghafari, S H ^a   Golnaraghi, M F ^a   Mansour, R ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b NSERC   (Canada)

Author keywords

Accelerometer; Inertial sensors; Micro fabrication technology; Micromachining; Silicon sensors

Indexed keywords

INERTIAL SENSORS; MICRO-FABRICATION TECHNOLOGY; VIBRATION MONITORING; VISCOUS DAMPING;

ACCELERATION; ACCELEROMETERS; ACOUSTIC NOISE; AUTOMOTIVE INDUSTRY; COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; DAMPING; ELECTROMECHANICAL DEVICES; FABRICATION; MATHEMATICAL MODELS; NAVIGATION SYSTEMS; SILICON SENSORS; THERMODYNAMICS; TRANSDUCERS; VISCOSITY;

MICROMACHINING;

EID: 6344226447     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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