Rule based validation of processing sequences

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 438-441

  Hansen, Ulli ^a   Germer, Christoph ^a   Büttgenbach, Stephanus ^a   Franke, Hans Joachim ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

MST CAD; Process compatibility; Process configuration; Process rules

Indexed keywords

COMPUTER AIDED DESIGN; DATABASE SYSTEMS; ITERATIVE METHODS; LOGIC PROGRAMMING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PROCESS ENGINEERING; TRIBOLOGY;

MST CAD; PROCESS COMPATIBILITY; PROCESS CONFIGURATION; PROCESS RULES;

MECHANICAL ENGINEERING;

EID: 6344222176     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. U. Hansen: A Data Model for the Representation of Fabrication Dependencies concerning Micromechanical Devices, Proc. MSM 2001, March 2001.
2. ILOG:,ILOG JRules 3.1: Users Manual', 2001.
3. K. Hahn: Methoden und Werkzeuge zur fertigungsnahen Entwurfsverifikation in der Mikrotechnik. Ph.D. Thesis, Universität Dortmund, 1999.
4. K. Hahn, R. Brück: Web-based Design Tools for MEMS-Process Configuration, Proc. MSM 99, April 1999.
5. K. Hahn, R. Brück, A. Priebe, C. Schneider: Cost estimation for LIGA fabrication flows using process design methods, J. Microsystem Technologies, 2000.
6. R. Kiehnscherf: Schlussbericht Teilprojekt 4: Mikrostrukturierungsverfahren, BMBF-Verbundprojekt METEOR, June, 1997.
7. R. Reiger, R. Kiehnscherf, S. Görlitz: Wissensbasiertes System für die fertigungs-, qualitätsgerechte und montagegerechte Konstruktion von Mikrosystemen, Proc. METEOR-Statusseminar, Nov., 1995.
8. U. Hansen, L. Steffensen, S. Büttgenbach: MST-CAD environment for anisotropic etching of silicon. Proc. MICRO.tec 2000, Sept. 2000.