Theoretical study of the output energy for various MEMS based electrostatic mechanisms

2008 IEEE International Conference on Sustainable Energy Technologies, ICSET 2008

Volumn , Issue , 2008, Pages 552-557

  Lim, Ye Mei ^a,b   Yang, Bin ^b   Kotlanka, Rama Krishna ^b   Heng, Chun Huat ^a   Xie, Jin ^b   Tang, Min ^b   Han, Johnny He ^b   Feng, Hanhua ^b   Lee, Chengkuo ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENT MECHANISMS; ENERGY OUTPUTS; ENERGY-HARVESTING; GAP CLOSINGS; IN PLANES; LOAD VOLUMES; MEMS (MICROELECTROMECHANICAL SYSTEM); OUT OF PLANES; OUTPUT ENERGIES; THEORETICAL STUDIES;

COMPOSITE MICROMECHANICS; ELECTROSTATICS; ENERGY CONSERVATION; MEMS; MICROELECTROMECHANICAL DEVICES;

MAGNETIC ANISOTROPY;

EID: 62949209065     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSET.2008.4747069     Document Type: Conference Paper

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