Micromask generation for polymer morphology control: Nanohair fabrication for synthetic dry adhesives

CIMTEC 2008 - Proceedings of the 3rd International Conference on Smart Materials, Structures and Systems - Smart Materials and Micro/Nanosystems

Volumn 54, Issue , 2008, Pages 439-444

  Sameoto, Dan ^a   Li, Yasong ^a   Menon, Carlo ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Biomimetic; Dry adhesive; MEMS; Morphology; Polymer; RIE; SU 8

Indexed keywords

ADHESIVES; BIOMIMETICS; COMPLIANT MECHANISMS; FUNCTIONAL POLYMERS; INTELLIGENT MATERIALS; MECHANISMS; MEMS; MORPHOLOGY; NANOTECHNOLOGY; POLYMERS; SURFACE MORPHOLOGY; VAN DER WAALS FORCES;

ADHESIVE PROPERTIES; CONTACT AREAS; DRY ADHESIVE; ETCHING PARAMETERS; MATERIAL BEHAVIOR; MICRO-FABRICATION TECHNOLOGY; POLYMER MORPHOLOGY; SU-8;

REACTIVE ION ETCHING;

EID: 62649141384     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/AST.54.439     Document Type: Conference Paper

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