Pulsed metalorganic chemical vapor deposition of high quality AIN/GaN superlattices for intersubband transitions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7222, Issue , 2009, Pages

  Bayram, C ^a   Fain, B ^a   Pere Laperne N ^a   Mc Clintock, R ^a   Razeghi, M ^a  

^a Northwestern University   (United States)

Author keywords

AIN GaN superlattice; Intersubband absorption; Intersubband transition; Metalorganic chemical vapor deposition; Terahertz

Indexed keywords

AIN/GAN SUPERLATTICE; INTERSUBBAND ABSORPTION; INTERSUBBAND TRANSITION; METALORGANIC CHEMICAL VAPOR DEPOSITION; TERAHERTZ;

ABSORPTION; SEMICONDUCTING ALUMINUM COMPOUNDS; SOOT BLOWERS; TEMPERATURE MEASUREMENT; VAPOR DEPOSITION; VAPORS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 62549095506     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.809829     Document Type: Conference Paper

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