The noble resists composed of eationic and anionic polymerizable PAGs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7140, Issue , 2008, Pages

  Oh, Jung Hoon ^a   Seo, Dong Chul ^a   Joo, Hyun Sang ^a   Jung, Sung Do ^a   Kim, Jin Ho ^a   Lee, Seung Jae ^a   Park, Ran Ra ^a   Han, Joon Hee ^a   Park, Joo Hyeon ^a  

^a Korea Kumho Petrochemical Co Ltd   (South Korea)

Author keywords

Anionic; Cationic; Polymer bound PAG

Indexed keywords

ACID DIFFUSIONS; ANIONIC; CATIONIC; NEW CLASS; POLYMER BACKBONES; POLYMER BOUND PAG; POLYMERIZATION PROCESS; SYNTHETIC PROCESS;

DYES; PHOTORESISTORS; PHOTORESISTS;

POLYMERS;

EID: 62449098329     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.804631     Document Type: Conference Paper

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