Fabrication of embedded microvalve on PMMA microfluidic devices through surface functionalization

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2008, Pages 267-272

  Toh, A G G ^a   Wang, Z F ^a   Ng, S H ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACID-CATALYZED HYDROLYSIS; AIR PLASMAS; ELECTRICAL RESISTANCES; FLUID PRESSURES; FTIR; FUNCTIONALIZED; MICRO VALVES; MICRO-FLUIDIC CHANNELS; MICRO-FLUIDIC DEVICES; MULTI-LAYER DEVICES; PDMS MEMBRANES; PDMS SURFACES; PDMS-PMMA; PNEUMATIC ACTUATIONS; PNEUMATIC PRESSURES; SURFACE FUNCTIONALIZATION; WATER CONTACT ANGLES;

AIR; CHIP SCALE PACKAGES; CONTACT ANGLE; FLUIDIC DEVICES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MEMS; MULTILAYERS; OPTICAL MICROSCOPY; PLASMAS; PNEUMATICS; SILICONES; SURFACE TREATMENT; WATER ANALYSIS; WATER TREATMENT;

MICROCHANNELS;

EID: 62249202143     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2008.4752998     Document Type: Conference Paper

References (9)

1. O. Geschke, H. Klank and P. Telleman, Microsystem engineering of lab-on-chip devices, Wiley-VCH Verlag: Germany, 2004.
2. M. A. Unger, H-P. Chou, T. Thorsen, A. Scherer and S. R. Quake, "Integrated elastomer fluidic Lab-on-a-chip- Surface patterning and DNA diagnostics", Science, vol. 288, pp. 113-116, 2000.
3. H-P. Chou et al.t "Microfluidic devices and methods of use", US patent no. US 7,258,774 B2.
4. J.N. Lee, C. Park and G.M. Whitesides, "Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices", Anal. Chem., vol. 75, pp. 6544-6554, 2003.
5. M.V. Risbund, R. Dabhade, S. Gangal and R.R. Bhonde, "Radio- frequency plasma treatment improves the growth and attachment of endothelial cells on poly(methyl methacrylate) substrates: implications in tissue engineering", J. Biomater. Sci. Pol. Edn., vol 13, pp. 1067-1080, 2002.
6. R. Xing, Z. Wang, Y. Han, "Embossing of polymers using a thermosetting polymer mold made by soft lithography", J. Vac. Sci. Technol. B, vol. 21, pp. 1318-1322, 2003.
7. P. Nising, T. Zeilmann and T. Meyer, "On the degradation and stabilization of poly(methylmethacrylate) in a continuous process", Chem. Eng. Technol., vol. 26, pp. 599-604, 2003.
8. L. Brown, T. Koerner, J. H. Horton and R. D. Oleschuk, "Fabrication and characterization of poly(methylmethacrylate) microfluidic devices bonded using surface modifications and solvents", Lab on chip, vol. 6, pp. 66-73, 2006.
9. C.W. Tsao, L. Hromada, J. Liu, P. Kumar and D.L. Devoe, "Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment", Lab on chip, vol. 7, pp. 499-505, 2007.