Flexible micro thermoelectric generator based on electroplated B1 2+xTe3-x

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2008, Pages 46-48

  Schwyter, Etienne ^a   Glatz, Wulf ^a   Durrer, Lukas ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; MEMS; MICROELECTROMECHANICAL DEVICES; SOLAR EQUIPMENT; TELLURIUM COMPOUNDS; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY;

CONTACT SURFACES; EXPERIMENTAL SET-UP; FABRICATION PROCESS; FLEXIBLE DESIGNS; MEASUREMENT RESULTS; MICRO-THERMOELECTRIC GENERATORS; MODEL CALCULATIONS; MODEL-BASED DESIGNS; TEMPERATURE DIFFERENCES;

DESIGN;

EID: 62249140249     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2008.4752949     Document Type: Conference Paper

References (5)

1. W. Glatz, S. Muntwyler, C. Hierold, "Optimization and Fabrication of Thick Flexible Polymer Based Micro Thermoelectric Generator", Sensors and Actuators A-Physical, Vol. 132, pp. 337-345, 2006
2. M. Takahashi, M. Kojima, S. Sato, N. Ohnisi, A. Nishiwaki, K. Wakita, T. Miyuki, S. Ikeda, and Y. Muramatsu, "Electric and thermoelectric properties of electrodeposited bismuth telluride (Bi2Te3) films", Journal of Applied Physics, Vol. 96, pp. 5582-5587, 2004
3. M. Martin-Gonzalez, A. Prieto, R. Gronsky, T. Sands, and A. Stacy, "lnsights into the Electrodeposition of Bi2Te3", Journal of the Electrochemical Society, Vol. 149 (11), pp. C546-C554, 2002
4. 3-x with controlled stoichiometry", submitted to Chemistry of Materials, ACS Publications, November 2007
5. H. Bottner, J. Nurnus, A. Gavrikov, G. Kuhner, M. Jagle, C. Kunzel, D. Eberhard, G. Plescher, A. Schubert, K.H. Schlereth, "New thermoelectric components using microsystem technologies", J. Microelectromech. Syst., Vol. 13, pp. 414-420, 2004