Coaxial, cylindrical and planar UV excilamps, pumped by glow or barrier discharge

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2992, Issue , 1997, Pages 24-34

  Tarasenko, Victor F ^a   Lomaev, Mikhail I ^a   Panchenko, Aleksei N ^a   Sosnin, Edvard A ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

Excilamps; Glow and barrier discharges; High power; Ultraviolet (UV); Vacuum Ultraviolet (VUV)

Indexed keywords

EXCIMER LASERS; GLOW DISCHARGES;

BARRIER DISCHARGES; EXCILAMPS; HIGH POWER; ULTRA-VIOLET; VACUUM ULTRAVIOLETS;

LIGHT;

EID: 61549099107     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.270096     Document Type: Conference Paper

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