Kinetic excitation of solids induced by energetic particle bombardment: Influence of impact angle

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 4, 2009, Pages 601-604

  Heuser, Christian ^a   Marpe, Mario ^a   Diesing, Detlef ^a   Wucher, Andreas ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Angular dependence; Electronic excitation; Impact angle; MIM; SRIM

Indexed keywords

METAL INSULATOR BOUNDARIES; MIM DEVICES; PROJECTILES; SOFTWARE PACKAGES;

ANGULAR DEPENDENCE; ELECTRONIC EXCITATION; IMPACT ANGLE; MIM; SRIM;

ELECTRIC EXCITATION;

EID: 61349176433     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.11.034     Document Type: Article

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