Novolak based thermally resistant positive photoresist: Resin design and performance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1086, Issue , 1989, Pages 85-96

  Zampini, A ^a   Fischer, R L ^a   Wickman, J B ^a  

^a Aspect Systems Corporation ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; GLASS TRANSITION; HYDROGEN; HYDROGEN BONDS; MOLECULAR WEIGHT; PHOTORESISTS; RESINS; STIFFNESS;

CHEMICAL COMPOSITIONS; DEFORMATION TEMPERATURES; GOOD CORRELATIONS; HIGH RESOLUTION; INTERMOLECULAR HYDROGEN BONDING; RESIN STRUCTURES; RESOLUTION CAPABILITY; THERMAL PERFORMANCE;

STRUCTURE (COMPOSITION);

EID: 60849106138     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.953021     Document Type: Conference Paper

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