Method to measure ethylene oxide/propylene oxide surfactants in resist developers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3333, Issue , 1998, Pages 1103-1114

  Holt, Rodica ^a   Oberlander, Joseph E ^a   Calindas, Maria Fides Y ^a   Gonzalez, Eleazar ^a   Ranque, Pilarcita L ^a  

^a CLARIANT CORPORATION   (United States)

Author keywords

EO PO surfactant; Resist developer

Indexed keywords

AMMONIUM COMPOUNDS; COBALT; COBALT COMPOUNDS; DICHLOROMETHANE; ETHYLENE;

AMMONIUM HYDROXIDES; ANALYTICAL METHODS; ANALYTICAL PROCEDURES; EO/PO SURFACTANT; INFLUENCE PARAMETERS; METHYLENE CHLORIDES; RESIST DEVELOPER; SIGNIFICANT IMPACTS; SURFACTANT CONCENTRATIONS; SURFACTANT CONTENTS;

NONIONIC SURFACTANTS;

EID: 60849103803     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.312456     Document Type: Conference Paper

References (2)

1. "Standard methods for the determination of water and wastewater", 18th Edition, 1992, APHA, AWA, WEF.
2. ASTM D2777-77, "Standard practice for determination of precision and bias of methods", Committee D-19 on water.