Influence of top electrode of PZT capacitor on ferroelectric properties

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4086, Issue , 2000, Pages 692-695

  Qiu, Pingsun ^a   Ding, Aili ^a   He, Xiyun ^a   Luo, Weigen ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Heat treatment condition; PZT capacitor; Top electrode

Indexed keywords

ELECTRIC FIELDS; FERROELECTRICITY; HEAT TREATMENT; SOL-GELS; THIN FILMS;

AU ELECTRODES; AUGER SPECTRUM; COERCIVE ELECTRIC FIELD; FERROELECTRIC CAPACITORS; FERROELECTRIC PROPERTY; HEAT TREATMENT CONDITIONS; REMNANT POLARIZATIONS; SOL-GEL TECHNIQUE;

ELECTRODES;

EID: 60649088729     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.408356     Document Type: Conference Paper

References (6)

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4. D. L. Polla and P. J. Schiller, Intergrated Ferroelectrics, 7, 359 (1995)
5. T. Yamazaki, K. Inoue, et al. IEDM Dig. Tech. Pap. 1997, p843
6. K. Amanuma, T. Tatsumi, et al. IEDM Dig. Tech. Pap. 1997, p363