Application of near-field optics to critical dimension metrology

Applied Physics Letters

Volumn 70, Issue 18, 1997, Pages 2368-2370

  Bukofsky, S J ^a   Selberg, S A ^a   Grober, R D ^a   Trautman, J K ^b  

^a Yale University   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 6044228251     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118865     Document Type: Article

References (13)

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