Monolithic formation of thin films on the vertical surface of a substrate by a dual-ion-beam sputtering technique

Applied Optics

Volumn 35, Issue 21, 1996, Pages 4128-4132

  Uzawa, Yutaka ^a,b   Niida, Sumaru ^a   Daibo, Masanori ^a,c   Kokubun, Yasuo ^a,d  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^b NEC CORPORATION   (Japan)

^c FUJIKURA LTD   (Japan)

^d KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Integrated photonics; Ion beam sputtering; Multilayer filter; Selective deposition; Thin film

Indexed keywords

EID: 6044220108     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.004128     Document Type: Article

References (6)

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