Ultrasonically assisted hydrothermal synthesis of polycrystalline PZT thin film on titanium substrate

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 56, Issue 1, 2009, Pages 9-13

  Kadota, Yoichi ^a   Ishikawa, Mutsuo ^a   Hosaka, Hiroshi ^a   Morita, Takeshi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROACOUSTIC TRANSDUCERS; IRRADIATION; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING LEAD COMPOUNDS; SOLIDS; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILM DEVICES; THIN FILMS; TITANIUM; ULTRASONIC TRANSDUCERS; ULTRASONICS; X RAY ANALYSIS;

POLY-CRYSTALLINE; PZT THIN FILMS; REACTION TEMPERATURES; SCANNING ELECTRONS; SEM; TITANIUM SUBSTRATES; ULTRASONIC IRRADIATIONS; ULTRASONICALLY ASSISTED HYDROTHERMAL SYNTHESIS; X-RAY DIFFRACTIONS;

HYDROTHERMAL SYNTHESIS;

EID: 60349085143     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2009.999     Document Type: Article

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