Thermal infrared detection using dipole antenna-coupled metal-oxide-metal diodes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 1, 2009, Pages 11-14

  Bean, Jeffrey A ^a   Tiwari, Badri ^a   Bernstein, Gary H ^a   Fay, P ^a   Porod, Wolfgang ^a  

^a University of Notre Dame   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA-COUPLED; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DETECTION CHARACTERISTICS; DETECTOR RESPONSE; DEVICE GEOMETRIES; DIRECT CURRENTS; FREQUENCY-SELECTIVE; HIGH-SPEED; LONG WAVE INFRARED; METAL DEPOSITIONS; METAL OXIDES; MULTI-SPECTRAL IMAGING; ROOM TEMPERATURES; SHADOW EVAPORATIONS; THERMAL INFRARED; WORK FOCUS;

ANTENNAS; CHARGE COUPLED DEVICES; DETECTORS; ELECTRON BEAMS; INFRARED RADIATION; METALLIC COMPOUNDS; METALS; MOS DEVICES; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR DIODES; SEMICONDUCTOR MATERIALS;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 59949084662     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3039684     Document Type: Article

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