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Volumn 48, Issue 1, 2009, Pages

Preparation of Pb(Mg1/3Nb2/3)O3-Pb(Zr,Ti) O3 thin films by RF-magnetron sputtering and their electrical and piezoelectric properties

(6) Fujii, Satoru a Fujii, Eiji a Takayama, Ryoichi a Tomozawa, Atsushi a Kamada, Takeshi a Torii, Hideo a

a PANASONIC CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FILMS; HEATING; LEAD; LEAD ALLOYS; MAGNETRONS; MICROOPTICS; NIOBIUM; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SOLIDS; SUBSTRATES; THIN FILMS; ZIRCONIUM;

INK JETS; MICRO ACTUATORS; PB(ZR ,TI)O; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC PROPERTIES; PMN-PZT; POLING TREATMENTS; PZT; PZT THIN FILMS; RF- MAGNETRON SPUTTERING; SI SUBSTRATES; SUBSTRATE HEATING; TIP DEFLECTIONS;

FILM PREPARATION;

EID: 59649087686 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.015502 Document Type: Article

Times cited : (13)

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