Effects of deposition parameters on structures of sputtered Ti films and TiO2 nanotube arrays prepared by anodic oxidation

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 37, Issue 12, 2008, Pages 2186-2190

  Tang, Yuxin ^a   Tao, Jie ^a   Tao, Haijun ^a   Zhang, Yanyan ^a   Li, Zhuanli ^a   Tian, Xilin ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Anodic oxidation; RF magnetron sputtering; Ti thin films; TiO2 nanotube arrays

Indexed keywords

GRAIN BOUNDARIES; HEATING; HYDROFLUORIC ACID; MAGNETRON SPUTTERING; MAGNETRONS; MOS CAPACITORS; NANOTUBES; OXIDATION; SUBSTRATES; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

ANODIZING VOLTAGES; CONSTANT POTENTIALS; CRYSTALLINITY; DEPOSITION PARAMETERS; GLASS SUBSTRATES; GRAIN ORIENTATIONS; HEXAGONAL CRYSTALS; HF SOLUTIONS; HIGHER TEMPERATURES; RF MAGNETRON SPUTTERING; ROOM TEMPERATURES; SPUTTERING POWER; SPUTTERING PRESSURES; SPUTTERING TIME; SUBSTRATE HEATING; THICKNESS OF THE FILMS; TI FILMS; TI THIN FILMS; TIO2 NANOTUBE ARRAYS; TITANIA NANOTUBES;

ANODIC OXIDATION;

EID: 59549086774     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. Mor G K, Varghese O K, Paulose M et al. Adv Funct Mater[J], 2005, 15: 1291
2. Yu Xiaofeng, Li Yongxiang, Ge Wanyin et al. Nano Technology[J], 2006, 17: 808
3. Macak J M, Tsuchiya H, Berger S et al. Chemical Physics Letters[J], 2006, 428: 421
4. Xiong Deping, Zhang Xiqing, Wang Jing et al. Chin Opt Lett[J], 2004, 3(3): 179
5. Müller K H. Appl Phys[J], 1986, 59(8): 2803
6. Cullity B D. Elements of X-Ray Diffraction[M]. [S.I.]: Addison-Wesley Publishing Company, 1978: 447
7. Tao Jie, Wang Wei, Tao Haijun et al. The Chinese Journal of Nonferrous Metals[J], 2005, 15(4): 578
8. Zhang Yuanyuan, Tao Jie, Pang Yingchun et al. Rare Metal Materials and Engineering[J], 2006, 35(3): 459
9. Wang Wei, Tao Jie, Wang Tao et al. Rare Metals[J], 2007, 26(2): 136
10. Tao Haijun, Tao Jie, Wang Tao et al. Trans Nonferrous Met Soc China[J], 2005, 15(3): 462