Demonstration of an imide coupling reaction on a Si(100)-2×1 surface by molecular layer deposition

Applied Physics Letters

Volumn 71, Issue 13, 1997, Pages 1890-1892

  Bitzer, T ^a   Richardson, N V ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5944253848     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120199     Document Type: Article

References (16)

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