Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping

Optics and Lasers in Engineering

Volumn 47, Issue 3-4, 2009, Pages 504-511

  Styk, Adam ^a   Patorski, Krzysztof ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Automatic fringe pattern analysis; Heterodyned time average interferometry; Spatial carrier phase shifting; Temporal phase shifting; Time average interferometry

Indexed keywords

CIVIL AVIATION; ERRORS; FUNCTIONS; INTERFEROMETERS; MATHEMATICAL TECHNIQUES; MODULATION; MOIRE FRINGES; PHASE SHIFT; TRACE ELEMENTS;

AUTOMATIC FRINGE PATTERN ANALYSIS; HETERODYNED TIME-AVERAGE INTERFEROMETRY; SPATIAL CARRIER PHASE SHIFTING; TEMPORAL PHASE SHIFTING; TIME-AVERAGE INTERFEROMETRY;

INTERFEROMETRY;

EID: 59349116305     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.03.004     Document Type: Article

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