Fabrication and characterization of three-dimensional all metallic photonic crystals for near infrared applications

Applied Physics Letters

Volumn 94, Issue 4, 2009, Pages

  Yang, Yu Lin ^a   Hou, Fu Ju ^b   Wu, Shich Chuan ^b   Huang, Wen Hsien ^b   Lai, Ming Chih ^b   Huang, Yang Tung ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTAL ATOMIC STRUCTURE; CRYSTALS; FABRICATION; HYDROGEN; INFRARED DEVICES; PHOTONIC BAND GAP; THREE DIMENSIONAL;

BAND EDGES; COMPLETE PHOTONIC BAND GAPS; DAMASCENE COPPERS; ELECTRON-BEAM LITHOGRAPHIES; FEATURE SIZES; HYDROGEN-SILESQUIOXANE; METALLIC PHOTONIC CRYSTALS; NEAR-INFRARED APPLICATIONS; NORMAL INCIDENCES; PROCESS METHODS; SIMULATION RESULTS; WHOLE PROCESS;

PHOTONIC CRYSTALS;

EID: 59349106122     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3075056     Document Type: Article

References (21)

1. K. M. Ho, C. T. Chan, C. M. Soukoulis, R. Biswas, and M. Sigalas, Solid State Commun. SSCOA4 0038-1098 10.1016/0038-1098(94)90202-X 89, 413 (1994).
2. S. Ogawa, M. Imada, S. Yoshimoto, M. Okano, and S. Noda, Science SCIEAS 0036-8075 10.1126/science.1097968 305, 227 (2004).
3. S. Kawashima, L. H. Lee, M. Okano, M. Imada, and S. Noda, Opt. Express OPEXFF 1094-4087 10.1364/OPEX.13.009774 13, 9774 (2005).
4. A. Chutinan and S. John, Opt. Express OPEXFF 1094-4087 10.1364/OE.14.001266 14, 1266 (2006).
5. S. Noda, K. Tomoda, N. Yamamoto, and A. Chutinan, Science SCIEAS 0036-8075 10.1126/science.289.5479.604 289, 604 (2000).
6. M. Deubel, G. V. Freytmann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, Nature (London) 3, 444 (2004). 0028-0836
7. W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, Opt. Express OPEXFF 1094-4087 10.1364/OE.15.003426 15, 3426 (2007).
8. J. -H. Lee, W. Leung, J. Ahn, T. Lee, I. -S. Park, K. Constant, and K. -M. Ho, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2720752 90, 151101 (2007).
9. S. Y. Lin, D. -X. Ye, T. -M. Lu, J. Bur, Y. S. Kim, and K. M. Ho, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2188049 99, 083104 (2006).
10. J. -H. Lee, C. -H. Kim, Y. -S. Kim, K. -M. Ho, and C. H. Oh, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2201621 88, 181112 (2006).
11. V. Mizeikis, S. Juodkazis, R. Tarozaite, J. Juodkazyte, K. Juodkazis, and H. Misawa, Opt. Express OPEXFF 1094-4087 10.1364/OE.15.008454 15, 8454 (2007).
12. A. Tal, Y. -S. Chen, H. E. Williams, R. C. Rumpf, and S. M. Kuebler, Opt. Express OPEXFF 1094-4087 10.1364/OE.15.018283 15, 18283 (2007).
13. S. Y. Lin, J. Moreno, and J. G. Fleming, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1592614 83, 380 (2003).
14. J. -H. Lee, Y. -S. Kim, K. Constant, and K. -M. Ho, Adv. Mater. (Weinheim, Ger.) ADVMEW 0935-9648 10.1002/adma.200602550 19, 791 (2007).
15. T. A. Walsh and S. -Y. Lin, IEEE Trans. Electron Devices 55, 1101 (2008). 0018-9383
16. D. P. Mancini, K. A. Gehoski, E. Ainley, K. J. Nordquist, D. J. Resnick, T. C. Bailey, S. V. Screenivasan, J. G. Ekerdt, and C. G. Willson, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.1515311 20, 2896 (2002).
17. E. D. Palik, Handbook of Optical Constants of Solids (Academic, London, 1985), p. 285.
18. M. A. Ordal, L. L. Long, R. J. Bell, S. E. Bell, R. R. Bell, R. W. Alexander, Jr., and C. A. Ward, Appl. Opt. 22, 1099 (1983). 0003-6935
19. I. El-Kady, M. M. Sigalas, R. Biswas, K. M. Ho, and C. M. Soukoulis, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.62.15299 62, 15299 (2000).
20. Z. -Y. Li, I. El-Kady, K. -M. Ho, S. Y. Lin, and J. G. Fleming, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1529294 93, 38 (2003).
21. J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature (London) NATUAS 0028-0836 10.1038/417052a 417, 52 (2002).