Effective mobility extraction based on a split RF C-V method for short-channel FinFETs

ESSDERC 2006 - Proceedings of the 36th European Solid-State Device Research Conference

Volumn , Issue , 2006, Pages 363-366

  Ramos, J ^a   Severi, S ^a   Augendre, E ^a   Kerner, C ^a   Chiarella, T ^a   Nackaerts, A ^a   Hoffmann, T ^a   Collaert, N ^a   Jurczak, M ^a   Biesemans, S ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DEVICES; ELECTRIC CURRENT MEASUREMENT; FIELD EFFECT TRANSISTORS; VOLTAGE MEASUREMENT;

C-V MEASUREMENTS; CHANNEL LENGTH; RADIO-FREQUENCY (RF); SION DIELECTRICS;

CARRIER MOBILITY;

EID: 59049104286     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDER.2006.307713     Document Type: Conference Paper

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