Study on site-selective growth of carbon nanotubes and diamond films with barrier layers

Journal of Manufacturing Science and Engineering

Volumn 130, Issue 6, 2008, Pages 0645011-0645014

  Su, Chun Hsi ^a   Lin, Chii Ruey ^a   Liau, Guo Tsai ^a   Chang, Ching Yu ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Carbon nanotubes; Diamond films; Patterned growth

Indexed keywords

CARBON FILMS; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRIC FIELDS; EXCITONS; PLASMA JETS;

BARRIER LAYERS; FIELD EMISSION MEASUREMENTS; FIELD EMITTER; MICROWAVE PLASMA JET; PATTERNED GROWTH; SELECTIVE AREAS; SILICON SUBSTRATES; SITE SELECTIVE;

DIAMOND FILMS;

EID: 59049095780     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2976120     Document Type: Article

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