Forced vibration analysis of piezoelectric quartz plates in resonance

Sensors and Actuators, A: Physical

Volumn 149, Issue 2, 2009, Pages 320-330

  Huang, Yu Hsi ^a   Ma, Chien Ching ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

ESPI; Mode shape; Piezoelectric material; Quartz; Resonant frequency

Indexed keywords

ACOUSTICS; ATOMIC FORCE MICROSCOPY; FINITE ELEMENT METHOD; INDUSTRIAL APPLICATIONS; LASER DOPPLER VELOCIMETERS; MEMS; NANOCANTILEVERS; OPTICAL INSTRUMENT LENSES; OXIDE MINERALS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; QUARTZ; STRUCTURAL PANELS; VIBRATING CONVEYORS;

DISPLACEMENT MEASUREMENTS; DOPPLER; ELECTRONIC SPECKLE PATTERN INTERFEROMETRIES; ESPI; EXPERIMENTAL MEASUREMENTS; EXPERIMENTAL TECHNIQUES; FINITE-ELEMENT METHODS; FORCED VIBRATIONS; FULL FIELDS; MEASURED DATUM; MODE SHAPE; NUMERICAL RESULTS; OPTICAL METHODS; OUT-OF-PLANE VIBRATIONS; PIEZO-ELECTRIC EFFECTS; PIEZOELECTRIC MATERIAL; PIEZOELECTRIC QUARTZ; QUARTZ PLATES; QUARTZ RESONATORS; REAL TIME; RESONANT FREQUENCY; VIBRATION CHARACTERISTICS; VIBRATION MODES; VIBROMETER;

NATURAL FREQUENCIES;

EID: 58949087368     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.12.001     Document Type: Article

References (27)

1. Mindlin R.D., and Deresiewicz H. Thickness-shear and flexural vibrations of rectangular crystal plates. J. Appl. Phys. 26 12 (1955) 1435-1442
2. Mindlin R.D., and Lee P.C.Y. Thickness-shear and flexural vibrations of partially plated, crystal plates. J. Solids Struct. 2 (1966) 125-139
3. Mindlin R.D., and Spencer W.J. An harmonic thickness-twist overtones of thickness-shear and flexural vibrations of rectangular, AT-cut quartz plates. J. Acoust. Soc. Am. 42 6 (1967) 1268-1277
4. Koga I. Radio-frequency vibrations of rectangular AT-cut quartz plates. J. Appl. Phys. 34 8 (1963) 2357-2365
5. Holland R. Contour extensional resonant properties of rectangular piezoelectric plates. IEEE Trans. Sonics Ultrason. SU-15 2 (1968) 97-105
6. Tiersten H.F. Linear Piezoelectric Plate Vibrations (1969), Plenum, New York pp. 59-61
7. Lin M.W., Abatan A.O., and Rogers C.A. Application of commercial finite element codes for the analysis of induced strain-actuated structures. J. Intell. Mater. Syst. Struct. 5 6 (1994) 869-875
8. Yong Y.K., and Stewart J.T. Mass-frequency influence surface, mode shapes, and frequency spectrum of a rectangular AT-cut quartz plate. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38 1 (1991) 67-73
9. Wang J., Yong Y.K., and Tsutomu I. Finite element analysis of the piezoelectric vibrations of quartz plate resonators with higher-order plate theory. J. Struct. Solids 36 (1999) 2303-2319
10. Butters J.N., and Leendertz J.A. Speckle patterns and holographic techniques in engineering metrology. Opt. Laser Technol. 3 1 (1971) 26-30
11. Løkberg O.J., and Hogmoen K. Use of modulated reference wave in electronic speckle pattern interferometry. J. Phys. E: Sci. Instrum. 9 10 (1976) 847-851
12. Koyuncu B. The investigation of high frequency vibration modes of PZT-4 transducers using ESPI techniques with reference beam modulation. Opt. Lasers Eng. 1 1 (1980) 37-49
13. Oswin J.R., Salter P.L., Santoyo F.M., and Tyrer J.R. Electronic speckle pattern interferometric measurement of flextensional transducer vibration patterns: in air and water. J. Sound Vib. 172 4 (1994) 433-448
14. Wang W.C., Hwang C.H., and Lin S.Y. Vibration measurement by the time-averaged electronic speckle pattern interferometry methods. Appl. Opt. 35 22 (1996) 4502-4509
15. Ma C.C., and Huang C.H. The investigation of three-dimensional vibration for piezoelectric rectangular parallelepipeds using the AF-ESPI method. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48 1 (2001) 142-153
16. Huang C.H., and Ma C.C. Experimental and numerical investigations of resonant vibration characteristics for piezoceramic plates. J. Acoust. Soc. Am. 109 6 (2001) 2780-2788
17. Ma C.C., and Huang C.H. Experimental full field investigations of resonant vibrations for piezoceramic plates by an optical interferometry method. Exp. Mech. 42 2 (2002) 140-146
18. Yong Y.K., Stewart J.T., Detaint J., Zarka A., Capelle B., and Zheng Y. Thickness-shear mode shapes and mass-frequency influence surface of a circular and electroded AT-cut quartz resonator. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 39 5 (1992) 609-617
19. Detaint J., Schwartzel J., and Joly C. Energy trapping resonators and interacted filters using the AT cut of quartz like materials. IEEE Freq. Control Symp. 4 (1992) 639-647
20. Ishizaki A. Three-dimensional analysis of forced vibrations of rectangular AT-cut quartz plates. IEEE Inter. Freq. Control Symp. 5 (1998) 942-946
21. Eernisse E.P., Ward R.W., Watts M.H., Wiggins R.B., and Wood O.L. Experimental evidence for mode shape influence on acceleration-induced frequency shifts in quartz resonators. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 37 6 (1990) 566-570
22. Zhou Y.S., and Tiersten H.F. On the normal acceleration sensitivity of contoured quartz resonators with the mode shape displaced with respect to rectangular supports. J. Appl. Phys. 69 5 (1991) 2862-2870
23. Kosinski J.A., Stewart J.T., Gualtieri J.G., Himmel J.S., McGowan R.C., Huynh D., Ballato A., and Filler R.L. The influence of mode shape on the acceleration sensitivity of SAW resonators. IEEE Ultrason. Symp. (1995) 183-186
24. Lee C.K., and Wu G.Y. High performance Doppler interferometer for advanced storage system. Jpn. J. Appl. Phys. 38 3B (1999) 1730-1741
25. Huang C.H., and Chen Y.Y. Transverse vibration analysis for piezoceramic rectangular plates using Ritz's method with equivalent constants. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53 2 (2006) 265-273
26. Abe H., Yoshida T., and Watanabe H. Energy trapping of thickness-shear vibrations excited by parallel electric field and its application to piezoelectric vibratory gyroscopes. IEEE Ultrason. Symp. (1998) 467-471
27. Lin Y.C., and Ma C.C. Experimental measurement and numerical analysis on resonant characteristics of piezoelectric disk with partial electrode designs. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51 8 (2004) 937-947