Design and fabrication of a micro Alvarez lens array with a variable focal length

Microsystem Technologies

Volumn 15, Issue 4, 2009, Pages 559-563

  Huang, Chunning ^a   Li, Lei ^a   Yi, Allen Y ^a  

^a The Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BROACHING; DIAMONDS; FABRICATION; FUNCTIONAL POLYMERS; INJECTION MOLDING; MICROELECTROMECHANICAL DEVICES; MOLDING; MOLDS; OPTICAL INSTRUMENTS; PLASTIC MOLDS; SURFACE ROUGHNESS;

FOCAL LENGTHS; INJECTION MOLDING PROCESS; LENS ARRAYS; MANUFACTURING COSTS; METAL MOLDS; OPTICAL PROFILERS; OPTICAL SURFACE FINISHES; SLOW TOOL SERVOS; ULTRA PRECISION; VARIABLE FOCAL LENGTHS;

LENSES;

EID: 58849130534     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0706-0     Document Type: Article

References (9)

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4. BP Keyworth DJ Corazza 1997 Single-step fabrication of refractive microlens arrays Appl Opt 36 2198 2202 10.1364/AO.36.002198
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7. ZD Popovic RA Sprague GAN Connell 1988 Technique for monolithic fabrication of microlens arrays Appl Opt 27 1281 1284
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9. WX Yu XC Yuan 2003 Fabrication of refractive microlens in hybrid SiO2/TiO2 sol-gel glass by electron beam lithography Opt Express 11 899 903