Temperature and humidity dependence of a polymer-based gas sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3082, Issue , 1997, Pages 40-48

  Buehler, Martin G ^a   Ryan, Margaret A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Co fired ceramic; Gas sensor; Humidity; Polymers; Temperature; Test chip; Test circuit

Indexed keywords

ATMOSPHERIC HUMIDITY; CERAMIC MATERIALS; CHEMICAL SENSORS; GAS DETECTORS; GASES; METEOROLOGY; MOISTURE; OPTICAL INSTRUMENTS; POLYMER FILMS; POLYMERS; SENSORS; TESTING;

CO-FIRED CERAMIC; GAS SENSOR; HUMIDITY; TEMPERATURE; TEST CHIP; TEST CIRCUIT;

HUMIDITY CONTROL;

EID: 58849090191     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.280933     Document Type: Conference Paper

References (5)

1. J. W. Gardner, "Microsensors, Principles and Applications," J. Wiley & Sons (Chichester, England, 1994)
2. M. S. Freund and N. S. Lewis, "A chemically diverse conducting polymer-based "electronic nose"," Proceedings of the National Academy. Science, Vol. 92, 2652-2656 (March 1995).
3. N. Lewis, "The Caltech Electronic Nose Project," Engineering and Science, 3-13 (1996).
4. M. G. Buehler and M. A. Ryan, "Gas Sensor Test Chips," International Conference on Microelectronic Test Structures, Vol. 9, 105-110 (1996).
5. M. G. Buehler, K. S. Manatt, and D. P. Martin, Test Structures Applied to the Rapid Prototyping of Sensors," International Conference on Microelectronic Test Structures, Vol. 10, 212-218 (1997).