Pulsed laser deposition of ferroelectric thin films for active microwave electronic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2991, Issue , 1997, Pages 238-246

  Horwitz, James S ^a   Chrisey, Douglas B ^a   Carter, A C ^a   Chang, Wontae ^a   Knauss, Lee A ^a   Pond, Jeffrey M ^a   Kirchoefer, Steven W ^a   Korn, D ^a   Qadri, Syen B ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Ferroelectric thin films; Loss tangent; Microwave devices; Pulsed laser deposition

Indexed keywords

BARIUM; CAPACITANCE; CERAMIC CAPACITORS; DIELECTRIC DEVICES; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES; FERROELECTRIC FILMS; FERROELECTRIC THIN FILMS; FERROELECTRICITY; LASERS; MICROWAVE DEVICES; MICROWAVES; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SINGLE CRYSTALS; SOLIDS; THERMOELECTRIC EQUIPMENT; THIN FILMS;

AG FILMS; DIELECTRIC LOSS MEASUREMENTS; FILM COMPOSITIONS; HIGH QUALITY THIN FILMS; INTERDIGITAL CAPACITOR (IDC); LASER DEPOSITIONS; LOSS TANGENT; LOW-PHASE-NOISE; SINGLE PHASING;

SILVER;

EID: 58749108988     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.273731     Document Type: Conference Paper

References (8)

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