Metrology of LIGO Pathfinder optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3134, Issue , 1997, Pages 79-85

  Farrant, David I ^a   Leistner, Achim J ^a   Oreb, Bozenko F ^a   Suchting, Mark A ^a   Walsh, Christopher J ^a  

^a CSIRO   (Australia)

Author keywords

Optical interferometry; Surface roughness

Indexed keywords

FRICTION; INTERFEROMETRY; MEASUREMENT ERRORS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

FREQUENCY VARIATIONS; LASER INTERFEROMETERS; OPTICAL INTERFEROMETRY; SURFACE ERRORS; SURFACE PROFILING; SURFACE VARIATIONS;

INTERFEROMETERS;

EID: 58749083413     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.279140     Document Type: Conference Paper

References (6)

1. A.J. Leistner, M. A. Suchting, P. A. Neuweger, J. A. Seckold, R. W. Bulla, P. J. Lennox, "LIGO pathfinder optics: fabrication techniques and procedures" paper 3134-08 this conference.
2. WYKO Corporation, 2650 E. Elvira Rd., Tucson AZ 85706. Mention or use of products by CSIRO does not constitute endorsement for their use.
3. Katherine Creath, "Error sources in phase measuring interferometry", Proc. SPIE 1720, pp.428-435, 1992.
4. See for example, B.S. Fritz, "Absolute calibration of an optical flat", Optical Engineering 23, pp. 379-383, 1984.
5. P. Hariharan and M.S. Suchting, "Optical flat surfaces: subtraction of small-scale irregularities of the reference surface", Proc. SPIE 2860, pp.306-312, 1996.
6. See for example, J.M. Bennett and L. Mattson, Introduction to surface roughness and scatterig, (Optical Society of America, Washington, DC, 1989) p.17.