Practical aspects of multiple-angle ellipsometry of semiconductor structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3094, Issue , 1997, Pages 333-338

  Zabashta, Lubov A ^a   Zabashta, Oleg I ^a   Dmitruk, Nikolas L ^b  

^a SUMY STATE UNIVERSITY   (Ukraine)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Ellipsometry; Interfacial layer; Inverse problem; Solution of ill posed problem

Indexed keywords

INVERSE PROBLEMS; PARAMETER ESTIMATION; POLARIMETERS;

INTERFACIAL LAYER; INVERSE PROBLEM; PRACTICAL ASPECTS; REGULARIZATION ALGORITHMS; SEMICONDUCTOR STRUCTURES; SOLUTION OF ILL-POSED PROBLEM;

ELLIPSOMETRY;

EID: 58649106648     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271836     Document Type: Conference Paper

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