Short repetitive pulses of 50-75 kV applied to plasma immersion implantation of aerospace materials

IEEE Transactions on Plasma Science

Volumn 37, Issue 1, 2009, Pages 204-210

  Rossi, Jose O ^a   Ueda, Mário ^a   Mello, Carina B ^a   Marcondes, Andre Ricardo ^a   Tóth, András ^b   da Silva, Graziela ^a,c  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b CHEMICAL RESEARCH CENTER   (Hungary)

^c INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

Author keywords

Aerospace materials; High energy; Plasma implantation; Surface treatment

Indexed keywords

ELECTRIC DISCHARGES; HIGH ENERGY PHYSICS; ION BOMBARDMENT; ION IMPLANTATION; MATERIALS; METALLIC COMPOUNDS; PLASMA APPLICATIONS; PLASMAS; PULSE GENERATORS; SURFACE TREATMENT;

AEROSPACE MATERIALS; BLUMLEIN; BLUMLEIN PULSERS; COST SYSTEMS; DISCHARGE MODES; HIGH ENERGY; HIGH ENERGY PLASMAS; NITROGEN ION IMPLANTATIONS; OPERATION REGIMES; PLASMA IMMERSION IMPLANTATION (PII); PLASMA IMPLANTATION; PULSE DURATION (PD); REPETITION RATES; SURFACE MODIFICATIONS; TI 6 AL 4V ALLOY; VACUUM SYSTEMS; VOLTAGE PULSES;

SURFACES;

EID: 58549088482     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.2005832     Document Type: Article

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