Commercial helium permeation leak standards: Their properties and reliability

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1242-1246

  Abbott, P J ^a   Tison, S A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844421528     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579935     Document Type: Article

References (5)

1. C. D. Ehrlich and J. A. Basford, J. Vac. Sci. Technol. A 10, 1 (1992).
2. K. E. McCulloh, C. R. Tilford, C. D. Ehrlich, and F. G. Long, J. Vac. Sci. Technol. A 5, 376 (1987).
3. C. D. Ehrlich and S. A. Tison, NIST (U.S.) Special Publication No. 250-38, 1992.
4. J. E. Shelby, 54, 125 (1971).
5. R. H. Doremus, Glass Science (Wiley, New York, 1973), p. 138.