Direct writing of conductive aluminum line on aluminum nitride ceramics by transversely excited atmospheric CO2 laser

Applied Physics Letters

Volumn 71, Issue 19, 1997, Pages 2758-2760

  Yabe, Hiroyuki ^a   Takahashi, Akihisa ^a   Sumiyoshi, Tetsumi ^a   Obara, Minoru ^a   Ishii, Katsunori ^b  

^a KEIO UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844357205     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120125     Document Type: Article

References (8)

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