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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 831-835

Unintentional hydrogenation of GaN and related alloys during processing

(9) Pearton, S J a Abernathy, C R a Vartuli, C B a Lee, J W a MacKenzie, J D a Wilson, R G b Shul, R J c Ren, F d Zavada, J M e

a UNIVERSITY OF FLORIDA (United States)

b Hughes Aircraft Co (United States)

c SANDIA NATIONAL LABORATORIES (United States)

d LUCENT TECHNOLOGIES (United States)

e U S ARMY RESEARCH OFFICE (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844323690 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580398 Document Type: Article

Times cited : (32)

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