Towards a nanostructured thermoelectric generator using ion-track lithography

Journal of Micromechanics and Microengineering

Volumn 18, Issue 10, 2008, Pages

  Koukharenko, E ^a   Li, X ^a   Nandhakumar, I ^a   Frety, N ^b   Beeby, S P ^a   Cox, D ^c   Tudor, M J ^a   Schiedt, B ^d   Trautmann, C ^d   Bertsch, A ^e   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b UNIVERSITÉ DE MONTPELLIER   (France)

^c UNIVERSITY OF SURREY   (United Kingdom)

^d GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH   (Germany)

^e EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; ELECTRIC RESISTANCE; ELECTRIC WIRE; ELECTROCHEMISTRY; ELECTROPLATING; ENERGY CONVERSION; ESTERS; IONS; LITHOGRAPHY; NANOWIRES; PHOTORESISTS; POLYIMIDES; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SOLAR EQUIPMENT; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY;

CHEMICAL COMPOSITIONS; CRYSTALLINE ORIENTATIONS; ELECTRICAL RESISTIVITIES; ELECTROPLATED THIN FILMS; MICROFABRICATION TECHNIQUES; NANOSTRUCTURED; NANOTEMPLATES; NEW GENERATIONS; POLIES (METHYL METHACRYLATE); PORE DIAMETERS; POWER HARVESTING; PREFERENTIAL ORIENTATIONS; PROCESS DEVELOPMENTS; PROMISING MATERIALS; RIGID SUBSTRATES; STOICHIOMETRIC COMPOSITIONS; SUB MICRONS; TEMPERATURE GRADIENTS; THERMOELECTRIC GENERATORS; THERMOELECTRIC MATERIALS; THERMOELECTRIC PROPERTIES;

TELLURIUM COMPOUNDS;

EID: 58149351351     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/10/104015     Document Type: Article

References (45)

1. He G, Eckert J, Loser W and Schultz L 2002 Novel Ti-base nanostructure-dendrite composite with enhanced plasticity Nature Mater. 2 33-7
2. Kuchibhatla S V N T, Karakoti A S, Bera D and Seal S 2007 One dimensional nanostructured materials Program. Mater. Sci. 52 699
3. Arico A S, Bruce P, Scrosati B, Tarascon J M and Van Schalkwijk W 2005 Nanostructured materials for advanced energy conversion and storage devices Nature Mater. 4 366-77
4. Law M, Goldberger J and Yang P 2004 Annu. Rev. Mater. Res. 34 83
5. Rowe D M 1995 CRC Handbook of Thermoelectrics (Boca Raton, FL: CRC Press)
6. Fleurial J P, Borschevsky M A, Ryan M A, Phillips W, Kolawa E, Kacisch T and Ewell R 1997 Proc. 16th Int. Conf. Thermoelectrics (Dresden, Germany) pp 641-6
7. Ivanova L D, Brovikova S A, Zusmann G and Rainshaus P 1994 Inorg. Mater. 30 770-5
8. Harman T C, Taylor P J, Walsh M P and LaForge B E 2002 Science 297 2229-32
9. Rowe D M, Shukla V S and Savvides N 1981 Nature 290 5809
10. Hicks L D and Dresselhaus M S 1993 Use of quantum-well superlattices to obtain a high figure of merit from nonconventional thermoelectric materials Appl. Phys. Lett. 63 3230-3
11. Watanabe N, Kawamata J and Toshima N 2004 Preparation of protected nanoparticles of bismuth telluride by laser ablation in solution Chem. Lett. 33 1368-9
12. 3 (Moskow: Nauka)
13. Mader S 1965 Metastable alloy films J. Vac. Sci. Technol. 2 35-41
14. 3 by metal organic chemical vapor deposition Thin Solid Films 303 1-3
15. 3 thin films Appl. Phys. Lett. 75 1401
16. 3 nanowires J. Sol. State Chem. 178 2163-6
17. 3 nanowires into nanoporous alumina templates with a rotating electrode J. Phys. Chem. B 110 12974-80
18. Snyder J G, Lim J R, Huang C-K and Fleurial J P 2003 Thermoelectric microdevice fabricated by a MEMS- like electrochemical process Nature Mater. 2 528-31
19. 3 films and nanowire arrays American Physical Society (APS) 2008 March Meeting (10-14 March) abstract #H20.009
20. Fert A and Piraux L 1999 Magnetic nanowires J. Magn. Magn. Mater. 200 338-58
21. Woo L, Ran J I, Go U, Sele and Nielsch K 2006 Fast fabrication of long-range ordered porous alumina membranes by hard anodization Nature Mater. 5 741-7
22. Yoo B, Xiao F, Bozhilov K N, Herman J, Ryan M A and Myung N V 2007 Electrodeposition of thermoelectric superlattice nanowires Adv. Mater. 19 296-9
23. Toimil Molares M E, Chtanko N, Cornelius T W C, Dobrev D, Enculescu1 I, Blick R H and Neumann R 2004 Fabrication and contacting of single Bi nanowires Nanotechnology 15 S201-7
24. Fleischer R L, Price P B and Walker R M 1975 Nuclear Tracks in Solids (Berkeley, CA: University of California Press)
25. Biederman H and Slavinska D 1998 Ion bombardment of organic materials and its potential application Proc. 1998 Int. Conf. Ion Implantation Technology (Kyoto, Japan) vol 2 pp 815-9
26. Fischer B E and Sporh R 1983 Production and use of nuclear tracks: imprinting structure on solids Rev. Mod. Phys. 55 907-48
27. Lindeberg M and Hjort K 2004 A comprehensive study of ion track enabled high aspect ratio microstructures in flexible circuit boards Microsyst. Technol. 10 608-21
28. Trautmann C, Brüchle W, Spohr R, Vetter J and Angert N 1996 Pore geometry of etched ion tracks in polyimide Nucl. Instrum. Methods B 111 70-4
29. Trautmann C, Bouffard S and Spohr R 1996 Etching threshold for ion tracks in polyimide Nucl. Instrum. Methods B 116 429-33
30. Skupinski M, Toulemonde M, Lindeberg M and Hjort K 2005 Ion tracks developed in polyimide resist on Si wafers as template for nanowires Nucl. Instrum. Methods Phys. Res. B 240 681-9
31. Klintberg L, Lindeberg M and Thornell G 2001 Sodium hypochlorite as a developer for heavy ion tracks in polyimide Nucl. Instrum. Methods Phys. Res. B 184 536-43
32. Vilensky A L, Oleinikov V A, Markov N G, Mchedishvili B V and Dontsova E P 1994 Polyimide track membranes for ultrafiltration and microfiltration Polym. Sci. 36 391-9
33. Doobeli M, Ames F, Musil C R, Scandella L, Suter M and Synal H A 1998 Surface tracks by MeV C60 impacts on mica and PMMA Nucl. Instrum. Methods Phys. Res. B 143 503-12
34. Mistry P, Gomez-Morilla I, Grime G W, Webb R, Jeynes C, Gwilliam R, Cansell A, Merchant M and Kirkby K J 2005 New developments on the Surrey microbeam applications to lithography Nucl. Instrum. Methods Phys. Res. B 231 428-32
35. Alves A, Reichart P, Siegele R, Johnston P N and Jamieson D N 2006 Ion beam lithography using single ions Nucl. Instrum. Methods Phys. Res. B 249 730-3
36. Rowe D M 2006 Thermoelectrics Handbook Macro to Nano (Boca Raton, FL: CRC Press)
37. 3 mixed crystals J. Phys. Chem. Solids 49 29-34
38. 3 crystals J. Phys. Chem. Solids 47 805-9
39. Miller G R and C-Y Li 1965 Evidence for the existence of antistructure defects in bismuth telluride by density measurements J. Phys. Chem. Solids 26 173-7
40. 3 Peltier device structures Phys. Status Solidi a 187 585-600
41. Koukharenko E, Frety N, Shepelevich V G and Tedenac J C 2001 Microstructural characterization of ultrarapid quenched bismuth and antimony tellurides alloys J. Cryst. Growth 222 773-8
42. Naletov V L and Bazhenov D R 1992 Proc. 3rd Int. Workshop on Thermoelectric Materials pp 22-3
43. 3 alloys near the stoichiometric region J. Alloys Comp. 267 100-4
44. Massalsky T 1988 Binary Alloys Phase Diagrams vol 1 (Metals Park, OH: American Society for Metals)
45. 3 electroplated layers using Hartman's theory of crystal growth J. Appl. Electrochem. 30 419-27