CW laser compaction of aqueous solution deposited metal oxide films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2966, Issue , 1997, Pages 307-314

  Exarhos, Gregory J ^a   Dennis, Tasshi ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b RICE UNIVERSITY   (United States)

Author keywords

Laser induced fluorescence; Lithography; Microstructure; Phase transformation; Thin film; Topology; Zirconia

Indexed keywords

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; CRYSTALLITE SIZE; DOPING (ADDITIVES); EMISSION SPECTROSCOPY; FLUORESCENCE; HEATING; HYDRATES; HYDRATION; IRRADIATION; LASER DAMAGE; LASER OPTICS; LASERS; LITHOGRAPHY; METAL REFINING; METALLIC COMPOUNDS; METALS; MICROSTRUCTURE; OPTICAL CONSTANTS; OPTICAL MATERIALS; RARE EARTH ELEMENTS; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SPECTROSCOPIC ELLIPSOMETRY; THIN FILM DEVICES; THIN FILMS; TOPOLOGY; ZIRCONIA; ZIRCONIUM;

APPLICATIONS.; AQUEOUS SOLUTIONS; CATALYZED OXIDATIONS; CRYSTALLINE METALS; CW LASERS; DEPOSITED METALS; EARTH PROBES; FLUENCES; FLUORESCENCE EMISSIONS; HYDRATED FILMS; INCIDENT LASER BEAMS; LASER INDUCED FLUORESCENCE; LASER IRRADIATIONS; METAL CATIONS; NITRATE ANIONS; OPTICAL METHODS; ORGANIC MATRIXES; PHASE TRANSFORMATION; POST IRRADIATIONS; PRECURSOR METALS; SILICON SUBSTRATES; SPIN CASTS; TRANSFORMATION PROCESSES; ZIRCONIUM DIOXIDE FILMS;

OXIDE FILMS;

EID: 58149280580     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.274284     Document Type: Conference Paper

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