Silicon solar cell process monitoring by PV-reflectometer

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn 2000-January, Issue , 2000, Pages 120-123

  Sopori, Bhushan ^a   Zhang, Yi ^a   Chen, Wei ^a   Madjdpour, Jamal ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PROCESS CONTROL; PROCESS MONITORING; REFLECTOMETERS; SILICON WAFERS; SOLAR CELLS;

AR COATINGS; CONTROL AND MONITORING; ITS APPLICATIONS; SI SOLAR CELLS;

SILICON SOLAR CELLS;

EID: 58149101647     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2000.915769     Document Type: Conference Paper

References (3)

1. Report of the Photovoltaic (PV) Industry Roadmap Workshop, Sept. 30, 1999.
2. th Workshop on Silicon Solar Cell Materials and Processes, Breckenridge, Colorado, Aug. 9-11, 1999, pp 74-80.
3. B. L. Sopori, "Principle of a new reflectometer for measuring dielectric film thickness on substrates of arbitrary characteristics," Rev. Sci. Instrum. 59(5), 725, 1988.